Effect of Annealing on Licoo2 Thin Film Deposited by Rf Magnetron Sputtering

AuthID
P-018-AMN
10
Author(s)
Benzarti, Z
·
Castro, JD
·
Carneiro, E
·
Pacheco, L
·
Duarte, N
·
Alves, C
·
Cruz, S
Document Type
Article
Year published
2025
Published
in Materials
Volume: 18, Issue: 6, Pages: 1217
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