Morais, J; Kumar, D; Houssa, M; Singh, RK; Landheer, D; Ramesh, R; Wallace, RM; Guha, S; Koinuma, H
Document Type
Proceedings Paper
Year published
2004
Published
in INTEGRATION OF ADVANCED MICRO-AND NANOELECTRONIC DEVICES-CRITICAL ISSUES AND SOLUTIONS in Materials Research Society Symposium Proceedings, ISSN: 0272-9172
Volume: 811, Pages: 347-352 (6)
Conference
Symposium on Integration of Advanced Micro-And Nanoelectronic Devices Held at the 2004 Mrs Spring Meeting, Date: APR 13-16, 2004, Location: San Francisco, CA, Sponsors: Mat Res Soc