A Comparative Investigation of the Damage Build-Up in Gan and Si During Rare Earth Ion Implantation

AuthID
 P-004-4DJ
4
Author(s)
Document Type
Article
Year published
2008
Published
in PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, ISSN: 0031-8965
Volume: 205, Issue: 1, Pages: 68-70 (3)
Conference
2Nd Workshop on Impurity Based Electroluminescent Devices and Materials (Ibedm 2006), Date: OCT 17-20, 2006, Location: Nanki Shirahama, JAPAN
Indexing
Wos®
Scopus®
Crossref®
Google Scholar®
Publication Identifiers
SCOPUS: 2-s2.0-38849089410
Wos: WOS:000252877300017
Source Identifiers
ISSN: 0031-8965
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