Analytical Model of Heterogeneous Atomic Recombination on Silicalike Surfaces

AuthID
P-004-75B
1
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Document Type
Article
Year published
2007
Published
in IEEE TRANSACTIONS ON PLASMA SCIENCE, ISSN: 0093-3813
Volume: 35, Issue: 5, Pages: 1397-1412 (16)
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SCOPUS: 2-s2.0-35348873215
Wos: WOS:000250993200025
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ISSN: 0093-3813
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