Magnetron Sputtered Ti-Si-C Thin Films Prepared at Low Temperatures

AuthID
 P-004-A2R
7
Author(s)
Riviere, JR
·
Le Bourhis, E
·
Document Type
Article
Year published
2007
Published
in SURFACE & COATINGS TECHNOLOGY, ISSN: 0257-8972
Volume: 201, Issue: 16-17, Pages: 7180-7186 (7)
Indexing
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Scopus®
Crossref®30
Google Scholar®
Publication Identifiers
SCOPUS: 2-s2.0-34147124949
Wos: WOS:000246509800038
Source Identifiers
ISSN: 0257-8972
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