Electrostatically Actuated Bilayer Polyimide-Based Microresonators

AuthID
 P-004-AZ0
3
Author(s)
·
Document Type
Article
Year published
2007
Published
in JOURNAL OF MICROMECHANICS AND MICROENGINEERING, ISSN: 0960-1317
Volume: 17, Issue: 4, Pages: 797-803 (7)
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Publication Identifiers
SCOPUS: 2-s2.0-34249069526
Wos: WOS:000245434200023
Source Identifiers
ISSN: 0960-1317
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