Correlation Between Processing and Properties of Titanium Oxycarbide, Tic(X)O(Y), Thin Films

AuthID
 P-004-B25
7
Author(s)
·
Goudeau, P
·
Le Bourhis, E
·
Riviere, JP
Document Type
Article
Year published
2007
Published
in PLASMA PROCESSES AND POLYMERS, ISSN: 1612-8850
Volume: 4, Issue: SUPPL.1, Pages: S83-S88 (6)
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Publication Identifiers
SCOPUS: 2-s2.0-67650623750
Wos: WOS:000207735200017
Source Identifiers
ISSN: 1612-8850
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