Modelling of Magnetron Sputtering of Tungsten Oxide with Reactive Gas Pulsing

AuthID
P-004-B26
Document Type
Article
Year published
2007
Published
in PLASMA PROCESSES AND POLYMERS, ISSN: 1612-8850
Volume: 4, Issue: SUPPL.1, Pages: S522-S526 (5)
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Publication Identifiers
Scopus: 2-s2.0-51349168910
Wos: WOS:000207735200100
Source Identifiers
ISSN: 1612-8850
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