Optical and Electrical Properties of W-O-N Coatings Deposited by Dc Reactive Sputtering

AuthID
 P-004-B2B
5
Author(s)
Martin, N
·
Document Type
Article
Year published
2007
Published
in PLASMA PROCESSES AND POLYMERS, ISSN: 1612-8850
Volume: 4, Issue: SUPPL.1, Pages: S69-S75 (7)
Indexing
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Scopus®
Crossref®9
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Publication Identifiers
SCOPUS: 2-s2.0-42749088462
Wos: WOS:000207735200015
Source Identifiers
ISSN: 1612-8850
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