Atomic Force Microscope Characterization of Pah/Pazo Multilayers

AuthID
 P-004-BKQ
6
Author(s)
Document Type
Article
Year published
2007
Published
in MICROELECTRONIC ENGINEERING, ISSN: 0167-9317
Volume: 84, Issue: 3, Pages: 506-511 (6)
Conference
Symposium on Nanoscale Imaging and Metrology of Devices and Innovative Materials Held at the 2006 Emrs Spring Meeting, Date: MAY 29-JUN 02, 2006, Location: Nice, FRANCE, Sponsors: European Mat Res Soc
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Wos®
Scopus®
Crossref®6
Google Scholar®
Publication Identifiers
Scopus: 2-s2.0-33846937782
Wos: WOS:000244903100023
Source Identifiers
ISSN: 0167-9317
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