Polymorphous Silicon Films Deposited at 27.12 Mhz

AuthID
 P-000-E78
7
Author(s)
Lebib, S
·
Guimaraes, L
Document Type
Article
Year published
2003
Published
in CHEMICAL VAPOR DEPOSITION, ISSN: 0948-1907
Volume: 9, Issue: 6, Pages: 333-337 (5)
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Publication Identifiers
Wos: WOS:000188051600009
Source Identifiers
ISSN: 0948-1907
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