in TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2
Pages: U1098-U1099 (2)
Conference
14Th International Conference on Solid-State Sensors, Actuators and Microsystems, Date: JUN 10-14, 2007, Location: Lyon, FRANCE, Sponsors: CEA, Leti, Minatec, IEEE, IEEE Electron Devices Soc, Elsevier