Characterization of Magnetron Co-Sputtered W-Doped C-Based Films

AuthID
P-004-G0P
3
Author(s)
Document Type
Article
Year published
2006
Published
in THIN SOLID FILMS, ISSN: 0040-6090
Volume: 515, Issue: 3, Pages: 1063-1068 (6)
Conference
33Rd International Conference on Metallurgical Coatings and Thin Films, Date: MAY 01-05, 2006, Location: San Diego, CA, Sponsors: Amer Vacuum Soc, Adv Surface Engn Div
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-33751103712
Wos: WOS:000242639600043
Source Identifiers
ISSN: 0040-6090
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