Nanostructure Characterization of High K Materials by Spectroscopic Ellipsometry

AuthID
 P-004-GGN
4
Author(s)
Document Type
Article
Year published
2006
Published
in APPLIED SURFACE SCIENCE, ISSN: 0169-4332
Volume: 253, Issue: 1, Pages: 339-343 (5)
Conference
Symposium P of the Spring Meeting of the European-Materials-Research-Society Entitled Curent Trends in Optical and X-Ray Meterology of Advanced Materials for Nanoscale Devices, Date: MAY 31-JUN 03, 2005, Location: Strasbourg, FRANCE
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Publication Identifiers
SCOPUS: 2-s2.0-33750516728
Wos: WOS:000242317500064
Source Identifiers
ISSN: 0169-4332
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