Theoretical Investigation of the Influence of the Wall Temperature on the Probability for Surface Atomic Recombination of a Single Species

AuthID
 P-004-GVG
1
Author(s)
Document Type
Article
Year published
2006
Published
in JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, ISSN: 0021-4922
Volume: 45, Issue: 10B, Pages: 8200-8203 (4)
Conference
6Th International Conference on Reactive Plasma/23Rd Symposium on Plasma Processing (Icrp-6/Spp-23), Date: JAN 24-27, 2006, Location: Matsushima, JAPAN, Sponsors: Japan Soc Appl Phys
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Publication Identifiers
SCOPUS: 2-s2.0-34547875429
Wos: WOS:000241902900036
Source Identifiers
ISSN: 0021-4922
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