Publications

Role of the Sio2 Buffer Layer Thickness in the Formation of Si/Sio2/Nc-Ge/Sio2 Structures by Dry Oxidation

AuthID
P-004-JA8

Author(s)

Kling, A

Ortiz, MI

Prieto, AC

Rodriguez, A

Rodriguez, T

Jimenez, J

Ballesteros, C

Soares, JC

Document Type

Article

Year published

2006

Published

in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, ISSN: 0168-583X

Volume: 249, Issue: 1-2 SPEC. ISS., Pages: 306-309 (4)

Conference

17Th International Conference on Ion Beam Analysis, Date: JUN 26-JUL 01, 2005, Location: Seville, SPAIN, Sponsors: Univ Autonoma Madrid, Univ Sevilla, Junta Andalucia, Minist Educ & Ciencia, Consejo Superior Investigaciones Cient, Int Atomic Energy Agcy, European Act COST G8, Boem Phys Soc, High Voltage Engn Europa BV, Banco Santander Cent Hispano, Schering Espana

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