Combined Rbs and Tem Characterization of Nano-Sige Layers Embedded in Sio2

AuthID
P-004-JAA
7
Author(s)
Ortiz, MI
·
Rodriguez, A
·
Rodriguez, T
·
BallesteroS, C
·
Document Type
Article
Year published
2006
Published
in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, ISSN: 0168-583X
Volume: 249, Issue: 1-2 SPEC. ISS., Pages: 451-453 (3)
Conference
17Th International Conference on Ion Beam Analysis, Date: JUN 26-JUL 01, 2005, Location: Seville, SPAIN, Sponsors: Univ Autonoma Madrid, Univ Sevilla, Junta Andalucia, Minist Educ & Ciencia, Consejo Superior Investigaciones Cient, Int Atomic Energy Agcy, European Act COST G8, Boem Phys Soc, High Voltage Engn Europa BV, Banco Santander Cent Hispano, Schering Espana
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-33745841350
Wos: WOS:000239545000112
Source Identifiers
ISSN: 0168-583X
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