Comparative Study of Ito Layers Deposited by Dc and Rf Magnetron Sputtering at Room Temperature

AuthID
 P-004-K6F
5
Author(s)
Khripunov, G
·
Kaelin, M
·
Tiwari, AN
Document Type
Article
Year published
2006
Published
in JOURNAL OF NON-CRYSTALLINE SOLIDS, ISSN: 0022-3093
Volume: 352, Issue: 9-20, Pages: 1466-1470 (5)
Conference
21St International Conference on Amorphous and Nanocrystalline Semiconductors, Date: SEP 04-09, 2005, Location: Lisbon, PORTUGAL
Indexing
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Scopus®
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Publication Identifiers
Scopus: 2-s2.0-33745444518
Wos: WOS:000238782900144
Source Identifiers
ISSN: 0022-3093
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