Effect of Deposition and Processing Conditions for Lanio3 Bottom Electrodes on the Properties of Pb(Zr,Ti)O-3 Thin Film Capacitors Made by Rf Magnetron Sputtering

AuthID
 P-004-P07
3
Author(s)
1
Editor(s)
Vilarinho, PM
Document Type
Article
Year published
2006
Published
in ADVANCED MATERIALS FORUM III, PTS 1 AND 2 in MATERIALS SCIENCE FORUM, ISSN: 0255-5476
Volume: 514-516, Issue: PART 2, Pages: 1343-1347 (5)
Conference
3Rd International Materials Symposium/12Th Meeting of the Sociedad-Portuguesa-Da-Materials (Materials 2005/Spm), Date: MAR 20-23, 2005, Location: Aveiro, PORTUGAL, Sponsors: Portuguese Mat Soc, Mat Network Atlantic Arc, CiCECO, BPI, Bayer Mat Sci, DURIT, IZASA, GIC, Novagres, Rauschert, CRIOLAB CRYOGENICS Vacuum Syst Vacuum Chambers, FCT, NTI EUROPE, Fdn Calouste Gulbenkian, ScienTec, ThermoLab, Papelave, cienciapt net, Air Liquide, Host: Univ Aveiro
Indexing
Wos®
Scopus®
Publication Identifiers
Scopus: 2-s2.0-35648997646
Wos: WOS:000238056400267
Source Identifiers
ISSN: 0255-5476
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