Raman Spectroscopy Analysis of Magnetron Sputtered Ruo2 Thin Films

AuthID
 P-000-F3J
3
Author(s)
1
Editor(s)
Klages C.P.Brauer G.Aegerter M.A.
Document Type
Article
Year published
2003
Published
in THIN SOLID FILMS, ISSN: 0040-6090
Volume: 442, Issue: 1-2, Pages: 93-97 (5)
Conference
4Th International Conference on Coatings on Glass, Date: NOV 03-07, 2002, Location: BRAUNSCHWEIG, GERMANY, Sponsors: ICCG Int Organising Comm, Fraunhofer Inst Surface Engn & Thin Films, Fraunhofer Inst Electron Beam & Plasma Technol
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Publication Identifiers
Scopus: 2-s2.0-0141859834
Wos: WOS:000185656200020
Source Identifiers
ISSN: 0040-6090
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