Study on Excimer Laser Irradiation for Controlled Dehydrogenation and Crystallization of Boron Doped Hydrogenated Amorphous/Nanocrystalline Silicon Multilayers

AuthID
 P-005-0D5
6
Author(s)
Document Type
Article
Year published
2013
Published
in THIN SOLID FILMS, ISSN: 0040-6090
Volume: 536, Pages: 147-151 (5)
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Publication Identifiers
SCOPUS: 2-s2.0-84877696754
Wos: WOS:000318974800021
Source Identifiers
ISSN: 0040-6090
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