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On the Growth Kinetics of Ni(Pt) Silicide Thin Films
AuthID
P-005-1G2
9
Author(s)
Demeulemeester, J
·
Smeets, D
·
Comrie, CM
·
Barradas, NP
·
Vieira, A
·
Van Bockstael, C
·
Detavernier, C
·
Temst, K
·
Vantomme, A
Document Type
Article
Year published
2013
Published
in
JOURNAL OF APPLIED PHYSICS,
ISSN: 0021-8979
Volume: 113, Issue: 16, Pages: 163504 (8)
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®
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Publication Identifiers
DOI
:
10.1063/1.4802738
SCOPUS
: 2-s2.0-84877302760
Wos
: WOS:000318550300017
Source Identifiers
ISSN
: 0021-8979
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