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Three-Step Amorphisation Process in Ion-Implanted Gan at 15 K
AuthID
P-000-GY0
5
Author(s)
Wendler, E
·
Kamarou, A
·
Alves, E
·
Gartner, K
·
Wesch, W
1
Editor(s)
Gamo K.Ohdomari I.Itoh H.Iwaki M.
Document Type
Article
Year published
2003
Published
in
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,
ISSN: 0168-583X
Volume: 206, Pages: 1028-1032 (5)
Conference
13Th International Conference on Ion Beam Modification of Materials,
Date:
SEP 01-06, 2002,
Location:
KOBE, JAPAN
Indexing
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®
Scopus
®
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®
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®
Metadata
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Publication Identifiers
DOI
:
10.1016/s0168-583x(03)00927-3
SCOPUS
: 2-s2.0-0038581177
Wos
: WOS:000183690500219
Source Identifiers
ISSN
: 0168-583X
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