Three-Step Amorphisation Process in Ion-Implanted Gan at 15 K

AuthID
P-000-GY0
5
Author(s)
Kamarou, A
·
Gartner, K
·
Wesch, W
1
Editor(s)
Gamo K.Ohdomari I.Itoh H.Iwaki M.
Document Type
Article
Year published
2003
Published
in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, ISSN: 0168-583X
Volume: 206, Pages: 1028-1032 (5)
Conference
13Th International Conference on Ion Beam Modification of Materials, Date: SEP 01-06, 2002, Location: KOBE, JAPAN
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-0038581177
Wos: WOS:000183690500219
Source Identifiers
ISSN: 0168-583X
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