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A Cross-Corner Effect in a Rectangular Sputtering Magnetron
AuthID
P-000-HS6
3
Author(s)
Fan, QH
·
Zhou, LQ
·
Gracio, JJ
Document Type
Article
Year published
2003
Published
in
JOURNAL OF PHYSICS D-APPLIED PHYSICS,
ISSN: 0022-3727
Volume: 36, Issue: 3, Pages: 244-251 (8)
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Publication Identifiers
DOI
:
10.1088/0022-3727/36/3/305
SCOPUS
: 2-s2.0-0037423503
Wos
: WOS:000181103600008
Source Identifiers
ISSN
: 0022-3727
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