Development of Tantalum Oxynitride Thin Films Produced by Pvd: Study of Structural Stability

AuthID
 P-006-68F
7
Author(s)
Cristea, D
·
Crisan, A
·
·
Document Type
Article
Year published
2013
Published
in APPLIED SURFACE SCIENCE, ISSN: 0169-4332
Volume: 285, Issue: PARTA, Pages: 19-26 (8)
Indexing
Wos®
Scopus®
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Google Scholar®
Publication Identifiers
SCOPUS: 2-s2.0-84886087891
Wos: WOS:000325960900004
Source Identifiers
ISSN: 0169-4332
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