Wave Driven Molecular Discharges as Sources of Active Species

AuthID
P-000-M14
6
Author(s)
Document Type
Article
Year published
2002
Published
in VACUUM, ISSN: 0042-207X
Volume: 69, Issue: 1-3, Pages: 183-187 (5)
Conference
12Th International School on Vacuum, Electron and Ion Technologies, Date: SEP 17-21, 2001, Location: VARNA, BULGARIA, Sponsors: Bulgarian Acad Sci, Inst Electr, Inst Ion Beam Phys & Mat Res, Res Ctr Rossendorf, Fdn Evrika
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Publication Identifiers
SCOPUS: 2-s2.0-0037168662
Wos: WOS:000180739000029
Source Identifiers
ISSN: 0042-207X
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