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Wave Driven Molecular Discharges as Sources of Active Species
AuthID
P-000-M14
6
Author(s)
Ferreira, CM
·
Tatarova, E
·
Dias, FM
·
Guerra, V
·
Henriques, J
·
Pinheiro, M
Document Type
Article
Year published
2002
Published
in
VACUUM,
ISSN: 0042-207X
Volume: 69, Issue: 1-3, Pages: 183-187 (5)
Conference
12Th International School on Vacuum, Electron and Ion Technologies,
Date:
SEP 17-21, 2001,
Location:
VARNA, BULGARIA,
Sponsors:
Bulgarian Acad Sci, Inst Electr, Inst Ion Beam Phys & Mat Res, Res Ctr Rossendorf, Fdn Evrika
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Publication Identifiers
DOI
:
10.1016/s0042-207x(02)00329-9
SCOPUS
: 2-s2.0-0037168662
Wos
: WOS:000180739000029
Source Identifiers
ISSN
: 0042-207X
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