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Optical Emission Spectroscopy and Langmuir Probe Characterisation of the Plasma During High-Pressure Sputter Deposition of High-T-C Superconducting Yba2Cu3O7-X Thin Films

AuthID
P-000-M17

Author(s)

Tsaneva, VN

Popov, TK

Dias, FM

Tarte, EJ

Blamire, MG

Evetts, JE

Barber, ZH

Document Type

Article

Year published

2002

Published

in VACUUM, ISSN: 0042-207X

Volume: 69, Issue: 1-3, Pages: 261-266 (6)

Conference

12Th International School on Vacuum, Electron and Ion Technologies, Date: SEP 17-21, 2001, Location: VARNA, BULGARIA, Sponsors: Bulgarian Acad Sci, Inst Electr, Inst Ion Beam Phys & Mat Res, Res Ctr Rossendorf, Fdn Evrika

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Publication Identifiers

DOI: 10.1016/s0042-207x(02)00342-1

SCOPUS: 2-s2.0-0037168571

Wos: WOS:000180739000042

Source Identifiers

ISSN: 0042-207X

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Optical Emission Spectroscopy and Langmuir Probe Characterisation of the Plasma During High-Pressure Sputter Deposition of High-T-C Superconducting Yba2Cu3O7-X Thin Films

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Optical Emission Spectroscopy and Langmuir Probe Characterisation of the Plasma During High-Pressure Sputter Deposition of High-T-C Superconducting Yba2Cu3O7-X Thin Films

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