Publications

Comparison of Low- and Room-Temperature Damage Formation in Ar Ion Implanted Gan and Zno

AuthID
P-006-965

Author(s)

Wendler, E

Wesch, W

Azarov, AY

Catarino, N

Redondo Cubero, A

Alves, E

Lorenz, K

Document Type

Article

Year published

2013

Published

in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, ISSN: 0168-583X

Volume: 307, Pages: 394-398 (5)

Conference

18Th International Conference on Ion Beam Modifications of Materials (Ibmm), Date: SEP 02-07, 2012, Location: Qingdao, PEOPLES R CHINA, Sponsors: Shanghai Inst Microsystem & Informat Technol, Tsinghua Univ, Natl Nat Sci Fdn China, Shandong Univ, Minist Educ, Key Lab Particle Phys & Particle Irradiat, Shandong Univ, State Key Lab Crystal Mat, High Voltage Engn Europa B V, Host: Shandong Univ

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