Two-Dimensional Fluid Modelling of Charged Particle Transport in Radio-Frequency Capacitively Coupled Discharges

AuthID
 P-000-MMC
3
Author(s)
Salabas, A
·
Gousset, G
·
Document Type
Review
Year published
2002
Published
in PLASMA SOURCES SCIENCE & TECHNOLOGY, ISSN: 0963-0252
Volume: 11, Issue: 4, Pages: 448-465 (18)
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Publication Identifiers
SCOPUS: 2-s2.0-0036862328
Wos: WOS:000180018500012
Source Identifiers
ISSN: 0963-0252
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