Application of Line-Scanning Microscopy Using a Linear Sensor in Semiconductor Industry: Shape and Thickness Measurements

AuthID
 P-006-FVJ
2
Author(s)
3
Editor(s)
Lehmann, PH; Osten, W; Albertazzi, A
Document Type
Proceedings Paper
Year published
2013
Published
in OPTICAL MEASUREMENT SYSTEMS FOR INDUSTRIAL INSPECTION VIII in Proceedings of SPIE, ISSN: 0277-786X
Volume: 8788
Conference
Conference on Optical Measurement Systems for Industrial Inspection Viii, Date: MAY 13-16, 2013, Location: Munich, GERMANY, Sponsors: SPIE
Indexing
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Scopus®
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Publication Identifiers
SCOPUS: 2-s2.0-84880744540
Wos: WOS:000323493700080
Source Identifiers
ISSN: 0277-786X
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