Improving Capacitance/Damping Ratio in a Capacitive Mems Transducer

AuthID
 P-006-HZQ
2
Author(s)
Document Type
Article
Year published
2014
Published
in JOURNAL OF MICROMECHANICS AND MICROENGINEERING, ISSN: 0960-1317
Volume: 24, Issue: 1, Pages: 015008 (15)
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Publication Identifiers
Scopus: 2-s2.0-84891123961
Wos: WOS:000328813900010
Source Identifiers
ISSN: 0960-1317
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