Microstructure Factor and Mechanical and Electronic Properties of Hydrogenated Amorphous and Nanocrystalline Silicon Thin-Films for Microelectromechanical Systems Applications

AuthID
 P-006-JK3
4
Author(s)
Mouro, J
·
Gualdino, A
·
Document Type
Article
Year published
2013
Published
in JOURNAL OF APPLIED PHYSICS, ISSN: 0021-8979
Volume: 114, Issue: 18, Pages: 184905 (12)
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Publication Identifiers
Scopus: 2-s2.0-84887862043
Wos: WOS:000327261800083
Source Identifiers
ISSN: 0021-8979
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