Dependence of the Strains and Residual Mechanical Stresses on the Performances Presented by A-Si : H Thin Film Position Sensors

AuthID
 P-000-NCK
9
Author(s)
Brida, D
·
Teixeira, T
·
Document Type
Article
Year published
2002
Published
in ADVANCED ENGINEERING MATERIALS, ISSN: 1438-1656
Volume: 4, Issue: 8, Pages: 612-616 (5)
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Publication Identifiers
SCOPUS: 2-s2.0-0036671949
Wos: WOS:000177862100023
Source Identifiers
ISSN: 1438-1656
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