Optical Fiber Interferometer for Measuring the D(33) Coefficient of Piezoelectric Thin Films with Compensation of Substrate Bending

AuthID
 P-000-PM3
4
Author(s)
Document Type
Article
Year published
2002
Published
in REVIEW OF SCIENTIFIC INSTRUMENTS, ISSN: 0034-6748
Volume: 73, Issue: 5, Pages: 2073-2078 (6)
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Wos®
Scopus®
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Google Scholar®
Publication Identifiers
SCOPUS: 2-s2.0-0036575007
Wos: WOS:000175194200015
Source Identifiers
ISSN: 0034-6748
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