Laser Micron Particle Removal from Silicon Surfaces: A Bidimensional Approach

AuthID
 P-007-905
3
Author(s)
Neves, P
·
Arronte, M
·
Document Type
Proceedings Paper
Year published
2000
Published
in Conference on Lasers and Electro-Optics Europe - Technical Digest
Pages: 214
Conference
2000 Confernce on Lasers and Electro-Optics Europe (Cleo 2000), Date: 10 September 2000 through 15 September 2000, Location: Nice, France, Sponsors: European Physical Society;IEEE;Lasers and Electro-Optics Society;Optical Society of America
Indexing
Scopus®
Publication Identifiers
SCOPUS: 2-s2.0-0033714151
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