Low Temperature Thin-Film Microelectromechanical Devices on Plastic Substrates

AuthID
 P-007-99F
5
Author(s)
Boucinha, M
·
5
Editor(s)
Collins,RW;Branz,HM;Stutzmann,M;Guha,S;Okamoto,H
Document Type
Proceedings Paper
Year published
2000
Published
in Materials Research Society Symposium - Proceedings, ISSN: 0272-9172
Volume: 609, Pages: A2121-A2126
Conference
Amorphous and Heterogeneus Silicon Thin Films-2000, Date: 24 April 2000 through 28 April 2000, Location: San Francisco, CA
Indexing
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Publication Identifiers
SCOPUS: 2-s2.0-0034429798
Source Identifiers
ISSN: 0272-9172
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