Krf Excimer Laser Dry and Steam Cleaning of Silicon Surfaces with Metallic Particulate Contaminants

AuthID
 P-000-QBJ
4
Author(s)
Arronte, M
·
Document Type
Article
Year published
2002
Published
in APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, ISSN: 0947-8396
Volume: 74, Issue: 2, Pages: 191-199 (9)
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Publication Identifiers
SCOPUS: 2-s2.0-0036477495
Wos: WOS:000174223800011
Source Identifiers
ISSN: 0947-8396
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