Piezoresistive Sensors on Plastic Substrates Using Doped Microcrystalline Silicon

AuthID
 P-007-9VH
3
Author(s)
1
Editor(s)
Stutzmann MBoyce JCohen J DCollins RHanna J
Document Type
Proceedings Paper
Year published
2001
Published
in Materials Research Society Symposium - Proceedings, ISSN: 0272-9172
Volume: 664, Pages: A1861-A1866
Conference
Amorphous and Heterogeneous Silicon Based Films 2001, Date: 16 April 2001 through 20 April 2001, Location: San Francisco, CA
Indexing
Scopus®
Publication Identifiers
SCOPUS: 2-s2.0-0035557328
Source Identifiers
ISSN: 0272-9172
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