in AMORPHOUS AND HETEROGENEOUS SILICON-BASED FILMS-2002 in MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS, ISSN: 0272-9172
Volume: 715, Pages: 713-718 (6)
Conference
Symposium on Amorphous and Heterogeneous Silicon-Based Films Held at the 2002 Mrs Spring Meeting, Date: APR 02-05, 2002, Location: SAN FRANCISCO, CA, Sponsors: Mat Res Soc
