Thin Film Microelectromechanical Systems

AuthID
P-000-QTT
3
Author(s)
4
Editor(s)
Cohen, JD; Abelson, JR; Matsumura, H; Robertson, J
Document Type
Proceedings Paper
Year published
2002
Published
in AMORPHOUS AND HETEROGENEOUS SILICON-BASED FILMS-2002 in MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS, ISSN: 0272-9172
Volume: 715, Pages: 745-755 (11)
Conference
Symposium on Amorphous and Heterogeneous Silicon-Based Films Held at the 2002 Mrs Spring Meeting, Date: APR 02-05, 2002, Location: SAN FRANCISCO, CA, Sponsors: Mat Res Soc
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-0036920226
Wos: WOS:000179162400108
Source Identifiers
ISSN: 0272-9172
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