Dissipation Mechanisms in Thin-Film Silicon Microresonators on Glass Substrates

AuthID
 P-007-EKM
3
Author(s)
1
Editor(s)
LaFan D.A.Ayon A.A.Madou M.J.McNie M.E.
Document Type
Proceedings Paper
Year published
2003
Published
in Materials Research Society Symposium - Proceedings, ISSN: 0272-9172
Volume: 782, Pages: 229-234
Conference
Micro- and Nanosystems, Date: 1 December 2003 through 3 December 2003, Location: Boston, MA, Sponsors: MRS
Indexing
Scopus®
Publication Identifiers
SCOPUS: 2-s2.0-2942737118
Source Identifiers
ISSN: 0272-9172
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