Publications

Calculation of Pore Size Distributions in Low-K Films

AuthID
P-007-GCQ

Author(s)

Ravikovitch, PI

Vishnyakov, A

Editor(s)

Seiler, DG; Diebold, AC; McDonald, R; Ayre, CR; Khosla, RP; Secula, EM

Document Type

Proceedings Paper

Year published

2005

Published

in Characterization and Metrology for ULSI Technology 2005 in AIP CONFERENCE PROCEEDINGS, ISSN: 0094-243X

Volume: 788, Pages: 517-521 (5)

Conference

5Th Conference on Characterization and Metrology for Ulsi Technology, Date: MAR 15-18, 2005, Location: Richardson, TX, Sponsors: Natl Inst Stand & Technol, SEMATECH, Amer Phys Soc, Natl Sci Fdn, Semiconductor Res Corp, Semiconductor Equipment & Mat Int, Univ Texas Dallas, Semiconductor Int

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