Full-Gap Positioning of Parallel-Plate Electrostatic Mems Using On-Off Control

AuthID
 P-007-N0C
4
Author(s)
Mol, L
·
Rocha, LA
·
Document Type
Proceedings Paper
Year published
2007
Published
in 2007 IEEE INTERNATIONAL SYMPOSIUM ON INDUSTRIAL ELECTRONICS, PROCEEDINGS, VOLS 1-8
Pages: 1464-1468 (5)
Conference
Ieee International Symposium on Industrial Electronics, Date: JUN 04-07, 2007, Location: Vigo, SPAIN, Sponsors: IEEE
Indexing
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Publication Identifiers
SCOPUS: 2-s2.0-50049115600
Wos: WOS:000252265103028
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