in IEEE 22ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2009) in Proceedings IEEE Micro Electro Mechanical Systems, ISSN: 1084-6999
Pages: 443-446 (4)
Conference
22Nd International Conference on Micro Electro Mechanical Systems (Mems), Date: JAN 25-29, 2009, Location: Sorrento, ITALY, Sponsors: IEEE, Robot & Automat Soc