Influence of a Dc Grid on Silane R.f. Plasma Properties

AuthID
 P-000-S2Q
3
Author(s)
Document Type
Article
Year published
2002
Published
in VACUUM, ISSN: 0042-207X
Volume: 64, Issue: 3-4, Pages: 387-392 (6)
Conference
4Th Iberian Vacuum Meeting (Ivm-4), Date: JUL 13-15, 2000, Location: SAMAMANCA, SPAIN, Sponsors: Spanish Vacuum Soc, Portuguese Vacuum Soc, Host: UNIV SALAMANCA, ESCUELA POLITECN SUPERIOR
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Publication Identifiers
SCOPUS: 2-s2.0-0036136012
Wos: WOS:000173202300032
Source Identifiers
ISSN: 0042-207X
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