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Mass Spectroscopy Analysis During the Deposition of A-Sic : H and A-C : H Films Produced by Hot Wire and Hot Wire Plasma-Assisted Techniques

AuthID
P-000-SEJ

Author(s)

Ferreira, I

Document Type

Article

Year published

2001

Published

in APPLIED SURFACE SCIENCE, ISSN: 0169-4332

Volume: 184, Issue: 1-4, Pages: 60-65 (6)

Conference

Spring Meeting of the European-Materials-Research-Society, Date: JUN 05-08, 2001, Location: STRASBOURG, FRANCE, Sponsors: European Mat Res Soc

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Publication Identifiers

DOI: 10.1016/s0169-4332(01)00478-0

SCOPUS: 2-s2.0-0035852208

Wos: WOS:000173000100010

Source Identifiers

ISSN: 0169-4332

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Mass Spectroscopy Analysis During the Deposition of A-Sic : H and A-C : H Films Produced by Hot Wire and Hot Wire Plasma-Assisted Techniques

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Mass Spectroscopy Analysis During the Deposition of A-Sic : H and A-C : H Films Produced by Hot Wire and Hot Wire Plasma-Assisted Techniques

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