Compact Gate Valve for Uhv

AuthID
P-000-SQ7
2
Author(s)
Document Type
Article
Year published
2001
Published
in VACUUM, ISSN: 0042-207X
Volume: 64, Issue: 1, Pages: 87-90 (4)
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-0035965543
Wos: WOS:000172331200010
Source Identifiers
ISSN: 0042-207X
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