Microstructure of Superhard (Ti,Al)N/Mo Multilayers

AuthID
 P-000-SZK
7
Author(s)
Riviere, JP
·
Pacaud, J
·
Garem, H
·
Pischow, K
·
Wang, Z
1
Editor(s)
Mitterer C.Pique A.Marchev K.Schneider J.M.Voevod A.A.
Document Type
Article
Year published
2001
Published
in THIN SOLID FILMS, ISSN: 0040-6090
Volume: 398, Pages: 397-404 (8)
Conference
28Th International Conference on Metallurgical Coatings and Thin Films, Date: APR 30-MAY 05, 2001, Location: SAN DIEGO, CALIFORNIA, Sponsors: AVS Sci & Technol Soc, Adv Surface Engn Div
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Publication Identifiers
SCOPUS: 2-s2.0-0035507104
Wos: WOS:000172906200068
Source Identifiers
ISSN: 0040-6090
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