Euv Radiation from Hydrogen Containing Microwave Plasmas

AuthID
P-008-6RZ
6
Author(s)
Felizardo, E
·
Gordiets, B
Document Type
Proceedings Paper
Year published
2011
Published
in 38th EPS Conference on Plasma Physics 2011, EPS 2011 - Europhysics Conference Abstracts
Volume: 35 2, Pages: 1812-1815
Conference
38Th Eps Conference on Plasma Physics 2011, Eps 2011, Date: 27 June 2011 through 1 July 2011, Location: Strasbourg
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Scopus: 2-s2.0-84867648254
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