A Simulation-Based Framework for Industrial Automated Wet-Etch Station Scheduling Problems in the Semiconductor Industry

AuthID
 P-008-7EJ
4
Author(s)
Aguirre, AM
·
Cafaro, VG
·
Mendez, CA
·
Document Type
Proceedings Paper
Year published
2011
Published
in 23rd European Modeling and Simulation Symposium, EMSS 2011
Pages: 384-393
Conference
23Rd European Modeling and Simulation Symposium, Emss 2011, Date: 12 September 2011 through 14 September 2011, Location: Rome
Indexing
Scopus®
Publication Identifiers
SCOPUS: 2-s2.0-84869498139
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